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Table of Contents

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Relevant Devices

Description

Qty

Source

Part Number

Notes

Turbo Pump

1

Leybold

LH TurboVac 450iX

Turbo Controller

1

Leybold

Turbo.Control i

Roots Pump

1

Leybold

LH EcoDry65

Slaved to Turbo Pump (no direct control)

High Vac gauge

1

Leybold

PTR 90 N

Combo Pirani and Cold Cathode gauge

Low Vac gauge

1

Leybold

TTR 91 N S

Pirani gauge

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Relevant Functional Block Diagram

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This page is focused on the devices in yellow boxes.

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Software Actions

Action

Notes

1

Read Telemetry

Pump and gauge telemetry available through Pump Controller webserver (Leybold turbo.control)

2

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Required Adjustable Settings

Setting

When Needed

Notes

Build

Observing

Maintenance

N/A

Telemetry only (no control)

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Required Telemetry

Parameter

Report Frequency

Purpose

Notes

1

Actual Power

Turbo pump health monitoring

Given on webserver status page (and “Data Viewer” page)

2

Actual Frequency

3

Bearing Temperature

4

Actual Voltage

5

Gauge 1 Pressure

Vac cart pipe pressure

6

Gauge 2 Pressure

Required Alarms

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Parameter

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Threshold

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Notes

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Relevant Datasheets & Manuals

Description

File

Source

1

EcoDry Roots Pump Manual

View file
nameEcoDry_Manual.pdf

2

Turbo.control Gauge and Pump Controller

View file
name300702826_002_C0_TurboControl_i_Software.pdf

3

Serial Interfaces for TURBOVAC

View file
name300450826_002_C0_Serial-TiX.PDF

4

Pump Power Supply “Brief Instructions”

View file
nameTurbo_Power_Supply_Manual.pdf

5

Relay Box manual

(Allows Turbo Pump to control Roots Pump)

View file
nameRelay_Box_Manual.pdf

6

‘Vacuum Measurement’ brochure containing specs on various gauges, including both of our gauges (PTR 90 N and TTR 91 N S)

View file
name3610019902_Sensors_2020_web.pdf

https://www.leyboldproducts.us/products/measuring-and-analysis-instruments/pressure-measurement/active-sensors/penningvac-transmitters/ptr-90-n/1542/penningvac-ptr-90-n

7

PTR 90 N Vacuum Gauge ‘Technical Data’ sheet

View file
namePTR_90N_TD_230072V02_EN57d6f9450e7ae.pdf

https://www.leyboldproducts.us/products/measuring-and-analysis-instruments/pressure-measurement/active-sensors/penningvac-transmitters/ptr-90-n/1542/penningvac-ptr-90-n

8

CAD Model for PTR 90 N gauge.

View file
nameCAD_230072V02-STP.zip

https://www.leyboldproducts.us/products/measuring-and-analysis-instruments/pressure-measurement/active-sensors/penningvac-transmitters/ptr-90-n/1542/penningvac-ptr-90-n

9

Datasheet for TTR 91 N S gauge.

Seems a bit outdated, and was downloaded from a vac supply company (not Leybold). However there was nothing on this part number at Leybold (closest was a TTR RNS model, which might be the newer version of our gauge).

View file
namevacshop-THERMOVAC_New-TTR91N.pdf

http://vacshop.ir/wp-content/uploads/2016/02/vacshop-THERMOVAC_New-TTR91N.pdf

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Relevant Software

Description

File

Notes

1

Vac pump built-in web server

View file
nameVacuum pump webserver.pdf

Offers control and (potentially) telemetry

2