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Table of Contents

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Page Status

DRAFT/INCOMPLETE

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Relevant Devices

Description

Qty

Source

Part Number

Notes

Vacuum Gauge Controller

1

Leybold

GRAPHIX Two

Controls the gauges on the chamber

RS-232 to Ethernet Adapter

1

Lantronix

UDS2100

This is the version with two serial ports

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Setting

When Needed

Notes

Build

Observing

Maintenance

Report Cadence

Device setup parameters follow:

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Parameter

Report Frequency

Purpose

Notes

1

Chamber High Pressure

2

Chamber Vacuum Pressure

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Required Alarms

Parameter

Threshold

Notes

1

2

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