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Table of Contents:
| Table of Contents |
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Page Status
DRAFT/INCOMPLETE
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Relevant Devices
Description | Qty | Source | Part Number |
|---|---|---|---|
Turbo Pump | 1 | Leybold | |
Turbo Controller | 1 | Leybold | |
Roots Pump | 1 | Leybold | |
High vac gauge | 2 | Leybold | |
Low vac gauge | 2 | Leybold | |
Turbo Purge valve | 1 | Leybold | |
Relay Box | 1 | Leybold |
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