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| Table of Contents |
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Page Status
DRAFT/INCOMPLETE
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Relevant Devices
Description | Qty | Source | Part Number |
|---|---|---|---|
Turbo Pump | 1 | Leybold | |
Turbo Controller | 1 | Leybold | |
Roots Pump | 1 | Leybold | |
High vac gauge | 2 | Leybold | |
Low vac gauge | 2 | Leybold | |
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Parameter | Report Frequency | Purpose | Notes | |
|---|---|---|---|---|
| 1 | Actual Power | Turbo pump health monitoring | Given on webserver status page (and “Data Viewer” page) | |
| 2 | Actual Frequency | |||
| 3 | Bearing Temperature | |||
| 4 | Actual Voltage | |||
| 5 | Gauge 1 Pressure | Vac cart pipe pressure | ||
| 6 | Gauge 2 Pressure |
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