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Table of Contents:


Page Status

DRAFT/INCOMPLETE


Relevant Devices

Description

Qty

Source

Part Number

Turbo Pump

1

Leybold

Turbo Controller

1

Leybold

Roots Pump

1

Leybold

High vac gauge

2

Leybold

Low vac gauge

2

Leybold


Relevant Functional Block Diagram

This page is focused on the devices in yellow boxes.


Software Actions

Action

Notes

1

Read Telemetry

Pump and gauge telemetry potentiallly available through Pump Controller (Leybold turbo.control)

2

3


Required Adjustable Settings

Setting

When Needed

Notes

Build

Observing

Maintenance


Required Telemetry

Parameter

Report Frequency

Purpose

Notes

1

Actual Power

Turbo pump health monitoring

Given on webserver status page (and “Data Viewer” page)

2

Actual Frequency

3

Bearing Temperature

4

Actual Voltage

5

Gauge 1 Pressure

Vac cart pipe pressure

6

Gauge 2 Pressure


Required Alarms

Parameter

Threshold

Notes

1

2


Relevant Datasheets & Manuals

Description

File

Source

1

EcoDry Roots Pump Manual

2

Turbo.control Gauge and Pump Controller

3

Serial Interfaces for TURBOVAC

4

5

6

Relay Box manual


Relevant Software

Description

File

Notes

1

Vac pump built-in web server

Offers control and (potentially) telemetry

2

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