Skip to end of metadata
Go to start of metadata

You are viewing an old version of this content. View the current version.

Compare with Current View Version History

« Previous Version 8 Next »


Table of Contents:


Relevant Devices

Description

Qty

Source

Part Number

Notes

Turbo Pump

1

Leybold

LH TurboVac 450iX

Turbo Controller

1

Leybold

Turbo.Control i

Roots Pump

1

Leybold

LH EcoDry65

Slaved to Turbo Pump (no direct control)

High Vac gauge

2

Leybold

PTR 90 N

Combo Pirani and Cold Cathode gauge

Low Vac gauge

2

Leybold

TTR 91 N S

Pirani gauge


Relevant Functional Block Diagram

This page is focused on the devices in yellow boxes.


Software Actions

Action

Notes

1

Read Telemetry

Pump and gauge telemetry potentially available through Pump Controller (Leybold turbo.control)

2


Required Adjustable Settings

Setting

When Needed

Notes

Build

Observing

Maintenance

N/A

Telemetry only (no control)


Required Telemetry

Parameter

Report Frequency

Purpose

Notes

1

Actual Power

Turbo pump health monitoring

Given on webserver status page (and “Data Viewer” page)

2

Actual Frequency

3

Bearing Temperature

4

Actual Voltage

5

Gauge 1 Pressure

Vac cart pipe pressure

6

Gauge 2 Pressure


Required Alarms

Parameter

Threshold

Notes

1

2


Relevant Datasheets & Manuals

Description

File

Source

1

EcoDry Roots Pump Manual

2

Turbo.control Gauge and Pump Controller

3

Serial Interfaces for TURBOVAC

4

Pump Power Supply “Brief Instructions”

5

Relay Box manual

(Allows Turbo Pump to control Roots Pump)


Relevant Software

Description

File

Notes

1

Vac pump built-in web server

Offers control and (potentially) telemetry

2

  • No labels

0 Comments

You are not logged in. Any changes you make will be marked as anonymous. You may want to Log In if you already have an account.