Vacuum Chamber Gate Valve

Table of Contents:

Introduction

A gate valve with a 6-inch port is installed between the vacuum pumps on the Vac Cart and the main vacuum chamber. It allows the main chamber to be isolated (and maintain vacuum pressure) if the Vac Cart needs to be turned off or removed from the chamber.

The model chosen is pneumatically actuated and can be opened or closed via an electrically-operated solenoid valve. There are also limit switches on the actuator which provide feedback on the open or closed state of the valve.

Note that if power is disconnected, or if the compressed air pressure drops, the gate valve will automatically close. This is desirable to help maintain the vacuum pressure within the main vacuum chamber during a power failure.

Relevant Devices

Relevant Functional Block Diagram

Cable Details

Relevant Datasheets & Manuals

Relevant Software