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Vacuum Pump System

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Created by Kodi Rider on Sept 25, 2020

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Table of Contents:

Relevant Devices

Description	Qty	Source	Part Number
Turbo Pump	1	Leybold
Turbo Controller	1	Leybold
Roots Pump	1	Leybold
High vac gauge	2	Leybold
Low vac gauge	2	Leybold
Turbo Purge valve	1	Leybold
Relay Box	1	Leybold

Relevant Functional Block Diagram

Software Actions

	Action	Notes
1
2
3

Required Adjustable Settings

Setting	When Needed			Notes
	Build	Observing	Maintenance

Required Telemetry

	Parameter	Report Frequency	Purpose	Notes
1
2

Required Alarms

	Parameter	Threshold	Notes
1
2

Relevant Datasheets & Manuals

	Description	File	Source
1
2
3
4
5

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