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Table of Contents:
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Introduction
A vent valve is located on the door flange of the main vacuum chamber. It is remotely-controlled by turning mains power (115V) on or off at its PDU outlet (via kpfpower).
This valve should only be operated by engineering staff while following the chamber venting procedure.
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Relevant Devices
Description | Qty | Source | Part Number |
|---|---|---|---|
Vent Valve for NW 25 with 115V Solenoid | 1 | Agilent Varian | L9942302 |
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