Table of Contents:
Introduction
A vent valve is located on the door flange of the main vacuum chamber. It is remotely-controlled by turning mains power (115V) on or off at its PDU outlet (via kpfpower).
This valve should only be operated by engineering staff while following the chamber venting procedure.
Relevant Devices
Description | Qty | Source | Part Number |
|---|---|---|---|
Vent Valve for NW 25 with 115V Solenoid | 1 | Agilent Varian | L9942302 |
Relevant Functional Block Diagram
Cable Details
Cable | Qty | Details | Notes |
|---|---|---|---|
Relevant Datasheets & Manuals
Description | File | Source | |
|---|---|---|---|
| 1 | Relevant Section of Agilent Varian Valve Catalog (with our valve highlighted). |  | https://www.idealvac.com/files/literature/11_Varian_2011_Vacuum_Valves.pdf |
| 2 | Full Agilent Varian Valve Catalog |
Relevant Software
Description | File | Source | |
|---|---|---|---|
| 1 | |||
| 2 |
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