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Table of Contents:


Introduction

A vent valve is located on the door flange of the main vacuum chamber. It is remotely-controlled by turning mains power (115V) on or off at its PDU outlet (via kpfpower).

The vent valve opens when power is applied, and closes when power is removed.

This valve should only be operated by engineering staff while following the chamber venting procedure.


Relevant Devices

Description

Qty

Source

Part Number

Vent Valve for NW 25 with 115V Solenoid

1

Agilent Varian

L9942302


Relevant Functional Block Diagram


Cable Details

Cable

Qty

Details

Notes


Relevant Datasheets & Manuals

Description

File

Source

1

Relevant Section of Agilent Varian Valve Catalog (with our valve highlighted).

https://www.idealvac.com/files/literature/11_Varian_2011_Vacuum_Valves.pdf

2

Full Agilent Varian Valve Catalog


Relevant Software

Description

File

Source

1

2

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