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A vent valve is located on the door flange of the main vacuum chamber. It is remotely-controlled by turning mains power (115V) on or off at its PDU outlet (via kpfpower).
The vent valve opens when power is applied, and closes when power is removed.
This valve should only be operated by engineering staff while following the chamber venting procedure. |
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Relevant Devices
Description | Qty | Source | Part Number |
|---|---|---|---|
Vent Valve for NW 25 with 115V Solenoid | 1 | Agilent Varian | L9942302 |
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